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Volumn , Issue , 1996, Pages 437-440
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Phosphorus and aluminum gettering - investigation of synergistic effects in single-crystal and multicrystalline silicon
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM ALLOYS;
DIFFUSION;
ELECTRIC CONDUCTIVITY;
OXIDATION;
PHOSPHORUS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON SOLAR CELLS;
SINGLE CRYSTALS;
SUBSTRATES;
MULTICRYSTALLINE SILICON;
PHOSPHORUS AND ALUMINUM GETTERING;
SEMICONDUCTING SILICON;
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EID: 0030395668
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (6)
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References (6)
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