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Volumn , Issue , 1996, Pages 437-440

Phosphorus and aluminum gettering - investigation of synergistic effects in single-crystal and multicrystalline silicon

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; DIFFUSION; ELECTRIC CONDUCTIVITY; OXIDATION; PHOSPHORUS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON SOLAR CELLS; SINGLE CRYSTALS; SUBSTRATES;

EID: 0030395668     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (6)

References (6)
  • Reference 정보가 존재하지 않습니다.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.