Study of hydrogen in hydrogenated Pd/semiconductor device by ERDA

Vacuum

Volumn 47, Issue 12, 1996, Pages 1427-1429

  Srivastava, P C ^a   Singh, U P ^a   Pandey, S P ^a   Avasthi, D K ^b  

^a BANARAS HINDU UNIVERSITY   (India)

^b INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION IN SOLIDS; HYDROGENATION; INTERFACES (MATERIALS); PALLADIUM; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DEVICES; SUBSTRATES; THIN FILMS;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); PALLADIUM OVERLAYERS; SEMICONDUCTING SUBSTRATES;

HYDROGEN;

EID: 0030395660     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(96)00215-1     Document Type: Article

References (11)

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