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Volumn 403, Issue , 1996, Pages 489-494
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Thermodynamics and microstructure development in the thin film reaction of aluminum on silicon carbide
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CALCULATIONS;
CHEMICAL REACTIONS;
INTERFACES (MATERIALS);
MICROSTRUCTURE;
OHMIC CONTACTS;
SATURATION (MATERIALS COMPOSITION);
SILICON CARBIDE;
THERMODYNAMICS;
THIN FILMS;
ALUMINUM CARBIDE;
INTERFACIAL RESISTIVITY;
THERMODYNAMIC ANALYSIS;
THIN FILM REACTION;
ALUMINUM;
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EID: 0030395263
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (11)
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