Materials compatibility between Si/SiO2 substrates and BaTiO3 thin films

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 189-193

  Caballero, J V ^a   Fuenzalida, V M ^a   Avila, R ^a   Eisele, I ^a  

^a UNIVERSITY OF CHILE   (Chile)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; CHEMICAL REACTIONS; INTERFACES (MATERIALS); SILICA; SILICON; SUBSTRATES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILING; SILICON SILICA SUBSTRATES;

INTERDIFFUSION (SOLIDS);

EID: 0030395255     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)