Electromigration in single-crystal aluminum lines pre-damaged by nanoindentation

Materials Research Society Symposium - Proceedings

Volumn 428, Issue , 1996, Pages 225-230

  Joo, Young Chang ^a   Baker, Shefford P ^a   Knauss, Michael P ^a   Arzt, Eduard ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DIFFUSION IN SOLIDS; DISLOCATIONS (CRYSTALS); GRAIN BOUNDARIES; MORPHOLOGY; PLASTIC DEFORMATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING FILMS; SINGLE CRYSTALS;

ELECTROMIGRATION INDUCED VOIDS; NANOINDENTATION DEVICE; POLYGRANULAR CLUSTERS;

ELECTROMIGRATION;

EID: 0030394769     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-428-225     Document Type: Conference Paper

References (9)