Eutectic bonds on wafer scale by thin film multilayers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 288-290

  Christensen, Carsten ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

EUTECTIC BONDS; SEMICONDUCTOR WAFERS;

BONDING; GOLD; MICROELECTRONICS; MULTILAYERS; TESTING; THERMAL EFFECTS; THIN FILMS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030394404     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)