Method for calculating the sputter distribution from a C-MAG cylindrical target in the presence of gas scattering

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1996, Pages 211-216

  Carniglia, C K ^a  

^a BOC Coating Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL METHODS; INTEGRATION; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; SUBSTRATES;

DEPOSITION RATES; GAS SCATTERING; SPUTTER TARGETS;

SPUTTER DEPOSITION;

EID: 0030393963     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)