Roll-to-roll fabrication of amorphous silicon solar modules on a polymer substrate

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1996, Pages 344-

  Jeffery, F R ^a   Grimmer, D P ^a   Martens, S A ^a   Thomas, M L ^a   Braymen, S ^a   Noak, M ^a  

^a Iowa Thin Film Technologies   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; ELECTRIC CONTACTS; LASER APPLICATIONS; MAGNETRON SPUTTERING; PLASMA APPLICATIONS; POLYMERS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SUBSTRATES; VACUUM DEPOSITED COATINGS;

LOW PRESSURE CHEMICAL VAPOR DEPOSITION; PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION; WEB COATINGS;

SILICON SOLAR CELLS;

EID: 0030393961     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)