Application of the rietveld method to XRD patterns of thin films recorded in parallel beam geometry

Materials Science Forum

Volumn 228-231, Issue PART 1, 1996, Pages 171-176

  Pitschke, W ^a  

^a IFW DRESDEN   (Germany)

Author keywords

Grazing Incidence Method; Rietveld Refinement; Thin film Structure

Indexed keywords

AMORPHOUS FILMS; ANNEALING; DEPOSITION; ELECTROMAGNETIC WAVE SCATTERING; SUBSTRATES; THIN FILMS; TRANSITION METAL COMPOUNDS;

GRAZING INCIDENCE METHOD; PARALLEL BEAM GEOMETRY; RIETVELD REFINEMENT; THIN FILM STRUCTURES; TRANSITION METAL SILICIDE THIN FILMS;

X RAY DIFFRACTION ANALYSIS;

EID: 0030393760     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.228-231.171     Document Type: Article

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