Education in semiconductor manufacturing processes through physically-based dynamic simulation

Proceedings - Frontiers in Education Conference

Volumn , Issue , 1996, Pages 250-253

  Lu, G Brian ^a   Oveissi, Mansour ^a   Eckard, David ^a   Rubloff, Gary W ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; ENGINEERING EDUCATION; GRAPHICAL USER INTERFACES; PERSONNEL TRAINING; PROCESS CONTROL;

DYNAMIC SIMULATORS; SOFTWARE PACKAGE VISSIM;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030393182     PISSN: 01905848     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)