BaxSr1-xTiO3 thin films made by TurboDiscTM PE-MOCVD techniques

Proceedings of the IEEE/CPMT International Electronic Manufacturing Technology (IEMT) Symposium

Volumn , Issue , 1996, Pages 200-204

  Li, Tingkai ^a   Zawadzki, Pete ^a   Stall, Richard A ^a  

^a EMCORE CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; COMPOSITION; CRYSTAL MICROSTRUCTURE; ELECTRIC PROPERTIES; GRAIN SIZE AND SHAPE; LEAKAGE CURRENTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PHASE TRANSITIONS; PLASMA APPLICATIONS; SINGLE CRYSTALS; SUBSTRATES; THICKNESS MEASUREMENT;

PLASMA ENHANCED METAL ORGANIC CHEMICAL VAPOR DEPOSITION (PEMOCVD); TURBODISC TECHNIQUE;

THIN FILMS;

EID: 0030393044     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)