Web coating by reactive plasma activated evaporation and sputtering processes

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1996, Pages 371-377

  Schiller, S ^a   Neumann, M ^a   Milde, F ^a  

^a Fraunhofer Institute Reliability and Microintegration   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; NITRIDES; OXIDES; PLASMA APPLICATIONS; PLASTIC FILMS; SPUTTER DEPOSITION;

NITRIDE FILMS; OXIDE FILMS; PULSED SPUTTER DEPOSITION; REACTIVE DEPOSITION; REACTIVE PLASMA ACTIVATED EVAPORATION; WEB COATINGS;

MAGNETRON SPUTTERING;

EID: 0030392880     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)