Surface morphology and microstructure of Al-O alloys grown by ECR plasma deposition

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 235-240

  Marshall, D A ^a   Barbour, J C ^a   Follstaedt, D M ^a   Howard, A J ^a   Lad, R J ^a  

^a UNIVERSITY OF MAINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTRON CYCLOTRON RESONANCE; FILM GROWTH; MICROSTRUCTURE; MORPHOLOGY; PLASMA APPLICATIONS; POLYCRYSTALLINE MATERIALS; STOICHIOMETRY; SURFACE ROUGHNESS; SURFACES;

ALUMINUM OXYGEN ALLOYS; ELECTRON BEAM EVAPORATION; PLASMA DEPOSITION;

ALUMINUM ALLOYS;

EID: 0030392375     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)