Measurements of stress evolution during thin film deposition

Materials Research Society Symposium - Proceedings

Volumn 428, Issue , 1996, Pages 499-504

  Chason, E ^a   Floro, J A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; FILM GROWTH; LASER APPLICATIONS; LIGHT MEASUREMENT; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

MULTIPLE PARALLEL LASER BEAM DEFLECTION; WAFER CURVATURE;

THIN FILMS;

EID: 0030392142     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-428-499     Document Type: Conference Paper

References (12)