Analysis of ellipsometric and thermoreflectance spectra for P-based III-V compounds GaP and InP

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 12 A, 1996, Pages 5946-5954

  Yoshikawa, Hisashi ^a   Adachi, Sadao ^a  

^a GUNMA UNIVERSITY   (Japan)

Author keywords

Critical point; Dielectric constant; GaP; InP; Modulation spectroscopy; Spectroscopic ellipsometry; Thermoreflectance

Indexed keywords

CRITICAL POINTS; INTERBAND TRANSITIONS; MODULATION SPECTROSCOPY; SPECTROSCOPIC ELLIPSOMETRY (SE); THERMOREFLECTANCE (TR) SPECTRA;

ELECTRON TRANSITIONS; ELLIPSOMETRY; ENERGY GAP; LIGHT MODULATION; PERMITTIVITY; PHOTONS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING INDIUM PHOSPHIDE; SPECTROSCOPIC ANALYSIS;

PHOSPHORUS COMPOUNDS;

EID: 0030392110     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.5946     Document Type: Article

References (37)

1. U. Rossow and W. Richter: Optical Characterization of Epitaxial Semiconductor Layers, ed. G. Bauer and W. Richter (Springer, Berlin, 1995) p. 68.
2. See, for example, R. K. Willardson and A. C. Beer: Semiconductors and Semimetals (Academic, New York, 1972) Vol. 9.
3. S. Ninomiya and S. Adachi: Jpn. J. Appl. Phys. 33 (1994) 2479.
4. S. Adachi and T. Miyazaki: Phys. Rev. B 51 (1995) 14317.
5. S. Imai and S. Adachi: Jpn. J. Appl. Phys. 32 (1993) 3860.
6. S. Ozaki, S. Adachi, M. Sato and K. Ohtsuka: J. Appl. Phys. 79 (1996) 439.
7. S. Adachi and T. Taguchi: Phys. Rev. B 43 (1991) 9569.
8. K. Sato and S. Adachi: J. Appl. Phys. 73 (1993) 926.
9. S. Adachi, T. Kimura and N. Suzuki: J. Appl. Phys. 74 (1993) 3435.
10. S. Adachi and T. Kimura: Jpn. J. Appl. Phys. 32 (1993) 3496.
11. S. Ozaki and S. Adachi: Jpn. J. Appl. Phys. 32 (1993) 5008.
12. S. Ninomiya and S. Adachi: J. Appl. Phys. 78 (1995) 1183.
13. S. Ninomiya and S. Adachi: J. Appl. Phys. 78 (1995) 4681.
14. N. Suzuki and S. Adachi: Jpn. J. Appl. Phys. 33 (1994) 193.
15. N. Suzuki, K. Sawai and S. Adachi: J. Appl. Phys. 77 (1995) 1249.
16. N. Suzuki and S. Adachi: Jpn. J. Appl. Phys. 34 (1995) 5977.
17. N. Suzuki and S. Adachi: J. Appl. Phys. 79 (1996) 2065.
18. S. Adachi: Phys. Rev. B 35 (1987) 7454.
19. S. Adachi: Jpn. J. Appl. Phys. 28 (1989) 1536.
20. Supplied from Furu-uti Chemical Co., Japan. The detailed composition was not disclosed.
21. E. Matatagui, A. G. Thompson and M. Cardona: Phys. Rev. 176 (1968) 950.
22. D. E. Aspnes and A. A. Studna: Phys. Rev. B 27 (1983) 985.
23. M. Cardona, K. L. Shaklee and F. H. Pollak: Phys. Rev. 154 (1967) 696.
24. S. M. Kelso, D. E. Aspnes, M. A. Pollack and R. E. Nahory: Phys. Rev. B 26 (1982) 6669.
25. See, for instance, D. Y. Smith: Handbook of Optical Constants of Solids, ed. E. D. Palik (Academic, Orlando, 1985) p. 35.
26. H. R. Philipp and H. Ehrenreich: Phys. Rev. 129 (1963) 1550.
27. T. Miyazaki and S. Adachi: Jpn. J. Appl. Phys. 31 (1992) 3770.
28. D. E. Aspnes, B. Schwartz, A. A. Studna, L. Derick and L. A. Koszi: J. Appl. Phys. 48 (1977) 3510.
29. H. J. Lewerenz, D. E. Aspnes, B. Miller, D. L. Malm and A. Heller: J. Am. Chem. Soc. 104 (1982) 3325.
30. A. H. Lettington, D. Jones and R. Sarginson: J. Phys. C: Solid State Phys. 4 (1971) 1534.
31. S. Adachi: Phys. Rev. B 41 (1990) 3504.
32. G. Guizzetti, L. Nosenzo, E. Reguzzoni and G. Samoggia: Phys. Rev. B 9 (1974) 640.
33. J. R. Chelikowsky and M. L. Cohen: Phys. Rev. B 14 (1976) 556.
34. S. Adachi: Phys. Rev. B 38 (1988) 12345.
35. W. Hanke and L. J. Sham: Phys. Rev. B 21 (1980) 4656.
36. M. del Castillo-Mussot and L. J. Sham: Phys. Rev. B 31 (1985) 2092.
37. B. O. Seraphin and N. Bottka: Phys. Rev. 145 (1966) 628.