Phase transitions, curve evolution, and the control of semiconductor manufacturing processes

Proceedings of the IEEE Conference on Decision and Control

Volumn 3, Issue , 1996, Pages 2355-3592

  Berg, Jordan ^a   Yezzi, Anthony ^a   Tannenbaum, Allen ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ESTIMATION; INTERFACES (MATERIALS); MATHEMATICAL MODELS; PHASE TRANSITIONS; REAL TIME SYSTEMS; SEMICONDUCTOR DEVICE MANUFACTURE;

CURVE EVOLUTION;

PROCESS CONTROL;

EID: 0030391735     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Review

References (23)