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Volumn 423, Issue , 1996, Pages 575-580
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Morphology of optically transparent cubic silicon carbide prepared by chemical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CHEMICAL VAPOR DEPOSITION;
CRYSTAL GROWTH;
CRYSTAL ORIENTATION;
GRAPHITE;
MORPHOLOGY;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING FILMS;
SINGLE CRYSTALS;
SUBSTRATES;
X RAY CRYSTALLOGRAPHY;
ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION;
SILICON CARBIDE;
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EID: 0030389580
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-423-575 Document Type: Conference Paper |
Times cited : (2)
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References (15)
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