RF magnetron sputter-deposition of La0.5Sr0.5CoO3//Pt composite electrodes for Pb(Zr,Ti)O3 thin film capacitors

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 145-150

  Raymond, M V ^a   Al Shareef, H N ^a   Tuttle, B A ^a   Dimos, D ^a   Evans, J T ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITORS; ELECTRIC CONDUCTIVITY; ELECTRODES; LANTHANUM COMPOUNDS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION; THERMAL EFFECTS; THIN FILMS;

RADIOFREQUENCY MAGNETRON SPUTTERING; THIN FILM CAPACITORS;

FERROELECTRIC MATERIALS;

EID: 0030389545     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-145     Document Type: Conference Paper

References (22)