A method for measuring thermoreflectance using polarization modulation

American Society of Mechanical Engineers, Heat Transfer Division, (Publication) HTD

Volumn 327, Issue , 1996, Pages 41-46

  Lee, Anthony S ^a,b   Norris, Pamela M ^a  

^a University of Virginia   (United States)

^b OptoElectronics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; REFLECTOMETERS; REFRACTIVE INDEX; SILICON WAFERS; TEMPERATURE MEASUREMENT;

ANGLE OF INCIDENCE; POLARIZATION MODULATION; THERMOREFLECTANCE TECHNIQUE;

HEAT CONDUCTION;

EID: 0030388569     PISSN: 02725673     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

1. Aspnes, D. E., Harbison, J. P., Studna, A. A., and Florez, L. T., 1988, "Reflectance-Difference Spectroscopy System for Real-Time Measurements of Crystal Growth," Appl. Phys. Lett., Vol. 52, pp. 957-959.
2. Born, M., and Wolf, E., 1989, Principles of Optics, Sixth edition, Chap. 1, Pergamon Press, New York.
3. Jackson, J. D., 1962, Classical Electrodynamics, John Wiley & Sons, Inc., New York.
4. Jasperson, S. N., Burge, D. K., and O'Handley, R. C., 1973, "A Modulated Ellipsometer for Studying Thin-film Optical Properties and Surface Dynamics," Surf. Sci., Vol. 37, pp. 548-558.
5. Jellison, G.E. Jr., and Burke, H. H., 1986, "The Temperature Dependence of the Refractive Index of Silicon at Elevated Temperatures at Several Laser Wavelengths," J. Appl. Phys., Vol. 60, No. 2, pp. 841-843.
6. Kemp, J. C., 1987, "Polarized Light and its Interactions with Modulating Devices," Hillsboro OR: Hinds Instruments, Inc.
7. Lee, A. S., and Norris, P. M., 1996, "A New Optical Method for Measuring Surface Temperature at Large Incidence Angles," Rev. Sci. Instrum. (in review).
8. Price, D. J., 1947, "The Temperature Variation of the Emissivity of Metals in the Near InfraRed," Proc. Phys. Soc. (London), Vol. 59, pp. 131-138.
9. Qiu, T. Q., Grigoropoulos, C. P., and Tien, C.-L., 1993, "Novel Technique for Noncontact and Microscale Temperature Measurements," Exp. Heat Trans., Vol. 6, pp. 231-241.
10. Tien, C.-L., Qiu, T. Q., and Norris, P. M., 1994, "Microscale Thermal Phenomena in Contemporary Technology," Thermal Sci. & Eng., Vol. 2, No. 1, pp. 1-11.
11. Welsch, E., and Ristau, D., 1995, "Photothermal Measurements on Optical Thin-films," Appl. Optics, Vol. 34, No. 31, pp. 7239-7253.
12. Wong, A., Lee, A., and Zhu, X. D., 1995, "Coverage Dependence of Quantum Tunneling Diffusion of Hydrogen and Deuterium on Ni(111)," Phys. Rev. B, Vol. 51, No. 7, pp. 4418-4425.
13. Wong, A., and Zhu, X. D., 1996, "An Optical Ellipsometry Study of Adsorption and Desorption of Dueterium and Xenon on Nickel (111)," Surf. Sci., (to appear).
14. Xiao, X., Xie, Y., and Shen, Y. R. , 1992, "Surface Diffusion Probed by Linear Optical Diffraction," Surf. Sci., Vol. 271, pp. 295-298.
15. Youn, H. S., Meng, X. F., and Hess, G. B., 1993, "Multilayer Adsorption of Xenon, Krypton, and Argon on Graphite: An Ellipsometric Study," Phys. Rev. B, Vol. 48, pp. 14556-14576.