Effects of sputter-deposited LaNiO3 electrode on the deposition and properties of ferroelectric thin films

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 169-174

  Wu, T B ^a   Wu, J M ^a   Wu, C M ^a   Shyu, M J ^a   Chen, M S ^a   Dorng, J S ^a   Yang, C C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTRODES; FILM GROWTH; FILM PREPARATION; LANTHANUM COMPOUNDS; MAGNETRON SPUTTERING; PEROVSKITE; SOL-GELS; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THERMAL EFFECTS; THIN FILMS;

BOTTOM ELECTRODES; PEROVSKITE PHASE FORMATION; RADIOFREQUENCY MAGNETRON SPUTTERING;

FERROELECTRIC MATERIALS;

EID: 0030388258     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-169     Document Type: Conference Paper

References (17)