Experimental study of Ar+ beams extracted from a cold or hot reflex discharge ion source (CHORDIS)

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 119, Issue 4, 1996, Pages 549-554

  Ratschko, D ^a,b   Zhou, B G ^a,c   Knolle, D ^a   Glaser M ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b UNIVERSITY OF OSNABRÜCK   (Germany)

^c NATIONAL INSTITUTE OF METROLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ION SOURCES;

ION BEAM DIAGNOSTICS; REFLEX DISCHARGE ION SOURCES;

ION BEAMS;

EID: 0030386943     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00639-8     Document Type: Article

References (11)

1. R. Keller, in: The Physics and Technology of Ion Sources, ed. I.G. Brown (Wiley, 1991) pp. 23-52.
2. C.D. Child, Phys. Rev. 32 (1911) 492.
3. I. Langmuir and K.T. Compton, Rev. Mod. Phys. 3 (1931) 191.
4. G.D. Alton, in: Experimental Methods in the Physical Sciences, eds. F.B. Dunning and R. Hulet (Academic Press, 1995) Chap. 3, pp. 82 and 83.
5. D. Knolle, D. Ratschko andM. Gläser, Rev. Sci. Instrum. 67 (9) (1996) 3082.
6. R. Keller, B.R. Nielson and B. Torp, Nucl. Instr. and Meth. B 37/38 (1989) 74.
7. R. Keller, P. Spädtke and H. Emig, Vacuum 36 (1986) 883.
8. R.G. Wilson and G.R. Brewer, in: Ion Beams with Application to Ion Implantation (Wiley, 1973) p. 181.
9. J.R. Coupland, T.S. Green, D.P. Hammond and A.C. Riviere, Rev. Sci. Instr. 44 (1973) 1258.
10. R.G. Wilson and G.R. Brewer, in: Ion Beams with Application to Ion Implantation (Wiley, 1973) pp. 11-117.
11. I. Chavet and R. Bernas, Nucl. Instr. and Meth. 51 (1967) 77.