Electrostatic problems in TFT-LCD production and solutions using ionization

Electrical Overstress/Electrostatic Discharge Symposium Proceedings

Volumn , Issue , 1996, Pages 365-370

  Murakami, Toshio ^a   Togari, Haruyuki ^a   Steinman, Arnold ^a  

^a HARADA Industry Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTROSTATICS; IONIZATION; THIN FILM TRANSISTORS;

ELECTROSTATIC DISCHARGE (ESD); STATIC CHARGE GENERATION;

LIQUID CRYSTAL DISPLAYS;

EID: 0030386831     PISSN: 07395159     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EOSESD.1996.865165     Document Type: Conference Paper

References (4)

1. Α. Steinman Semiconductor International 73 76 September 1994 Cahners Publishing Company Static Charge: It's a Killer!
2. Seidenki Taisaku Manual (Manual of Countermeasures for Electrostatics) 8 14 1989 OHM-SHA
3. J. Rush A. Steinman Reduction of Static Related Defects and Controller Problems in Semiconductor Production Automation Equipment Proceedings of the Ultraclean Manufacturing Conference Proceedings of the Ultraclean Manufacturing Conference 1994-October
4. Handbook of Electrostatics 1986 The Institute of Electrostatics of Japan. OHM-SHA