SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 290-291, Issue , 1996, Pages 435-439

Multi-level interconnects for heterojunction bipolar transistor integrated circuit technologies

(5) Patrizi, Gary A a Lovejoy, Michael L a Enquist, Paul M b Schneider Jr , Richard P a Hou, Hong Q a

a SANDIA NATIONAL LABORATORIES (United States)

b RTI INTERNATIONAL (United States)

Author keywords

Benzocyclobutene; Heterojunction bipolar transistors; Multi level interconnects; Planarization

Indexed keywords

DRY ETCHING; ELECTRIC RESISTANCE; HETEROJUNCTION BIPOLAR TRANSISTORS; INTEGRATED CIRCUIT MANUFACTURE; INTEGRATED OPTOELECTRONICS; OPTICAL INTERCONNECTS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DEVICE STRUCTURES;

BENZOCYCLOBUTENE; PHOTORECEIVERS; PLANARIZATION;

SEMICONDUCTING FILMS;

EID: 0030386756 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09058-X Document Type: Article

Times cited : (7)

References (8)

1
- 0027703102
- P.B. Chinoy and J. Tajadod, IEEE Trans. Components, Hybrids, Manufact. Technol., 16 (1993) 714.
- (1993) IEEE Trans. Components, Hybrids, Manufact. Technol. , vol.16 , pp. 714
- Chinoy, P.B.¹ Tajadod, J.²

2
- 51249165799
- S. Bothra, M. Kellam and P. Garrou, J. Electron. Mater., 23 (1994) 819.
- (1994) J. Electron. Mater. , vol.23 , pp. 819
- Bothra, S.¹ Kellam, M.² Garrou, P.³

3
- 0041820498
- M.L. Lovejoy, G.A. Patrizi, P.M. Enquist, R.F. Carson, D.C. Craft and R.J. Shul, Proc. 46th Electronic Components and Technology Conference, Orlando, FL, 1996.
- Proc. 46th Electronic Components and Technology Conference, Orlando, FL, 1996
- Lovejoy, M.L.¹ Patrizi, G.A.² Enquist, P.M.³ Carson, R.F.⁴ Craft, D.C.⁵ Shul, R.J.⁶

4
- 0028383690
- D.B. Slater Jr., P.M. Enquist and J.A. Hutchby, IEEE Electron Device Lett., 15 (1994) 91.
- (1994) IEEE Electron Device Lett. , vol.15 , pp. 91
- Slater D.B., Jr.¹ Enquist, P.M.² Hutchby, J.A.³

5
- 0042822481
- T. Lester, R.K. Surridge, S. Eicher, J. Hu, G. Este, H. Nentwich, B. MacLaurin, D. Kelly and I. Jones, Proc. 20th International Symposium on Gallium Arsenide and Related Compounds, Freiburg, Germany, 1993, p. 449.
- (1993) Proc. 20th International Symposium on Gallium Arsenide and Related Compounds, Freiburg, Germany , pp. 449
- Lester, T.¹ Surridge, R.K.² Eicher, S.³ Hu, J.⁴ Este, G.⁵ Nentwich, H.⁶ Maclaurin, B.⁷ Kelly, D.⁸ Jones, I.⁹

6
- 0027987573
- U. Dahlgren, J. Svedin, H. Johansson, O. Hagel, H. Zirath, C. Karlsson and N. Rorsman, Proc. IEEE MTT-S International Microwave Symposium Digest, San Diego, CA, 1994, p. 661.
- (1994) Proc. IEEE MTT-S International Microwave Symposium Digest, San Diego, CA , pp. 661
- Dahlgren, U.¹ Svedin, J.² Johansson, H.³ Hagel, O.⁴ Zirath, H.⁵ Karlsson, C.⁶ Rorsman, N.⁷

7
- 0029511448
- M.L. Lovejoy, G.A. Patrizi, P.M. Enquist, B.H. Rose, D.B. Slater, Jr., R.J. Shul, R.F. Carson, D.C. Craft, D.J. Rieger and J.A. Hutchby, Technical Digest of the IEEE GaAs IC Symposium, San Diego, CA, 1995, p. 181.
- (1995) Technical Digest of the IEEE GaAs IC Symposium, San Diego, CA , pp. 181
- Lovejoy, M.L.¹ Patrizi, G.A.² Enquist, P.M.³ Rose, B.H.⁴ Slater D.B., Jr.⁵ Shul, R.J.⁶ Carson, R.F.⁷ Craft, D.C.⁸ Rieger, D.J.⁹ Hutchby, J.A.¹⁰

8
- 0041820499
- M.L. Lovejoy, G.A. Patrizi, D.J. Rieger and C.J. Barbour, Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA, 1996.
- (1996) Int. Conf. on Metallurgical Coatings and Thin Films, San Diego, CA
- Lovejoy, M.L.¹ Patrizi, G.A.² Rieger, D.J.³ Barbour, C.J.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.