Silicon epitaxy over porous silicon

Electron Technology (Warsaw)

Volumn 29, Issue 2-3, 1996, Pages 196-200

  Nossarzewska Orlowska, E ^a   Lipinski, D ^a   Pawlowska, M ^a   Brzozowski, A ^a   Przyborowska, K ^a  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ELECTRIC CONDUCTIVITY OF SOLIDS; EPITAXIAL GROWTH; MICROMACHINING; SILICON ON INSULATOR TECHNOLOGY;

EPITAXIAL SILICON LAYERS;

POROUS SILICON;

EID: 0030386750     PISSN: 00709816     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)