Step coverage of Pb(Zr,Ti)O3 thin films grown by MOCVD

Materials Research Society Symposium - Proceedings

Volumn 433, Issue , 1996, Pages 201-206

  Shimizu, M ^a   Hyodo, S ^a   Fujisawa, H ^a   Niu, H ^a   Shiosaki, T ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; FILM GROWTH; FILM PREPARATION; LEAD COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PEROVSKITE; SEMICONDUCTOR GROWTH; THERMAL EFFECTS; THIN FILMS;

GROWTH TEMPERATURE; REACTION PRESSURE; STEP COVERAGE;

FERROELECTRIC MATERIALS;

EID: 0030386505     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-433-201     Document Type: Conference Paper

References (9)