Use of on-product measurements for process control for improved manufacturing efficiency and reduced costs

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1996, Pages 370-374

  Cosway, Richard G ^a   Ridens, Martin G ^a   Peters, Megan ^a   Catmull, Kelvin ^a   Chilton, Shane R ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; DIELECTRIC MATERIALS; DIFFUSION; PATTERN RECOGNITION; PROCESS CONTROL; PRODUCT DESIGN; PRODUCTION; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DEVICE TESTING; THICKNESS MEASUREMENT;

IN LINE MEASUREMENT; ON PRODUCT MEASUREMENT; SCRIBE GRID PROCESS CONTROL STRUCTURES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030386154     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)