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Volumn 290-291, Issue , 1996, Pages 23-29

Optical reflectance reduction of textured silicon surfaces coated with an antireflective thin film

Author keywords

Chemical etching; Optical reflectance; Porous silicon; Silicon micromachining

Indexed keywords

ETCHING; LIGHT ABSORPTION; MICROMACHINING; OPTICAL COATINGS; POROUS SILICON; REFLECTOMETERS; SILICON WAFERS; SPECTRUM ANALYSIS; SURFACE PROPERTIES; THIN FILMS;

EID: 0030386042     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09064-5     Document Type: Article
Times cited : (26)

References (15)
  • 1
    • 0026632110 scopus 로고
    • Low cost silicon solar cells with high efficiency at high concentrations
    • S. Khemthong, S. Cababiss, J. Zhao and A. Wang, Low cost silicon solar cells with high efficiency at high concentrations, Proc. 22nd IEEE PVSC, 1 (1991) 268-271.
    • (1991) Proc. 22nd IEEE PVSC , vol.1 , pp. 268-271
    • Khemthong, S.1    Cababiss, S.2    Zhao, J.3    Wang, A.4
  • 2
    • 0025420649 scopus 로고
    • 24% efficient PERL structure silicon solar cells
    • J.A. Zhao, A. Wang and M.A. Green, 24% efficient PERL structure silicon solar cells, Proc. 21st IEEE PVSC, 2 (1990) 333-335.
    • (1990) Proc. 21st IEEE PVSC , vol.2 , pp. 333-335
    • Zhao, J.A.1    Wang, A.2    Green, M.A.3
  • 4
    • 0026946919 scopus 로고
    • The formation, morphology, and optical properties of porous silicon structures
    • P.C. Searson, J.M. Macaulay and S.M. Prokes, The formation, morphology, and optical properties of porous silicon structures, J. Electrochem. Soc., 139 (1992) 3373-3378.
    • (1992) J. Electrochem. Soc. , vol.139 , pp. 3373-3378
    • Searson, P.C.1    Macaulay, J.M.2    Prokes, S.M.3
  • 5
    • 0026224890 scopus 로고
    • Micromachined silicon surfaces for maximizing optical absorption at 632.8 nm
    • S.G. Uyehata and E.S. Kolesar, Micromachined silicon surfaces for maximizing optical absorption at 632.8 nm, J. Micromech. Microeng., 1 (1991) 171-181.
    • (1991) J. Micromech. Microeng. , vol.1 , pp. 171-181
    • Uyehata, S.G.1    Kolesar, E.S.2
  • 7
    • 0023998037 scopus 로고
    • Anisotropic etching of silicon in hydrazine
    • M. Mehregany and S.D. Senturia, Anisotropic etching of silicon in hydrazine, Sensors and Actuators, 13 (1988) 375-390.
    • (1988) Sensors and Actuators , vol.13 , pp. 375-390
    • Mehregany, M.1    Senturia, S.D.2
  • 8
    • 0027608534 scopus 로고
    • Electrochemical etching of silicon by hydrazine
    • K.B. Sundaram and H.W. Chang, Electrochemical etching of silicon by hydrazine, J. Electrochem. Soc., 140 (1993) 1592-1597.
    • (1993) J. Electrochem. Soc. , vol.140 , pp. 1592-1597
    • Sundaram, K.B.1    Chang, H.W.2
  • 9
    • 84885757292 scopus 로고
    • Electrolytic shaping of germanium and silicon
    • A. Uhlir, Jr., Electrolytic shaping of germanium and silicon, Bell Syst. Tech. J., 35 (1956) 333-347.
    • (1956) Bell Syst. Tech. J. , vol.35 , pp. 333-347
    • Uhlir A., Jr.1
  • 10
    • 0141775174 scopus 로고
    • Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers
    • L.T. Canham, Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers, Appl. Phys. Lett. B, 57 (1990) 1046-1048.
    • (1990) Appl. Phys. Lett. B , vol.57 , pp. 1046-1048
    • Canham, L.T.1
  • 13
    • 0012500211 scopus 로고
    • The extreme values of reflectivity and the conditions for zero reflection from thin dielectric films on metal
    • K. Park, The extreme values of reflectivity and the conditions for zero reflection from thin dielectric films on metal, Appl. Opt., 3 (1964) 877-881.
    • (1964) Appl. Opt. , vol.3 , pp. 877-881
    • Park, K.1
  • 14
    • 0042322780 scopus 로고
    • Mirror coatings for low visible and high infrared reflectance
    • G. Mass, H.H. Schroeder and A.F. Turner, Mirror coatings for low visible and high infrared reflectance, J. Opt. Soc. Am., 28 (1956) 31-35.
    • (1956) J. Opt. Soc. Am. , vol.28 , pp. 31-35
    • Mass, G.1    Schroeder, H.H.2    Turner, A.F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.