New fabrication process for active micro-sized metal/ceramic devices

American Society of Mechanical Engineers, Aerospace Division (Publication) AD

Volumn 52, Issue , 1996, Pages 695-702

  Ervin, James D ^a   Brei, Diann ^a   Van Hoy, Charles A ^a   Mawdsley, Jennifer R ^a   Halloran, John W ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CERAMIC MATERIALS; FABRICATION; PIEZOELECTRIC MATERIALS; PROCESSING;

ACTIVE MICROSIZED DEVICES; NEW FABRICATION PROCESS;

EXTRUSION;

EID: 0030385549     PISSN: 07334230     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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