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Volumn 228-231, Issue PART 2, 1996, Pages 451-456
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Residual stress in diamond coatings by synchrotron radiation XRD
a a b b c,d |
Author keywords
Diamond; HFCVD; Residual Stress; Synchrotron Radiation; Thin Films; XRD
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COATINGS;
DIFFRACTOMETERS;
INDUSTRIAL APPLICATIONS;
INTERFACES (MATERIALS);
RESIDUAL STRESSES;
STRAIN MEASUREMENT;
STRESS ANALYSIS;
SYNCHROTRON RADIATION;
THERMAL STRESS;
THIN FILMS;
X RAY DIFFRACTION;
DIAMOND COATINGS;
HOT FILAMENT CHEMICAL VAPOR DEPOSITION;
RESIDUAL STRESS ANALYSIS;
DIAMOND FILMS;
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EID: 0030385401
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.228-231.451 Document Type: Article |
Times cited : (5)
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References (10)
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