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Volumn , Issue , 1996, Pages 597-600
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Automation in HEM silicon ingot production
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL GROWTH FROM MELT;
CRYSTALLINE MATERIALS;
GRAIN SIZE AND SHAPE;
HEAT EXCHANGERS;
HEATING FURNACES;
INGOTS;
MOLTEN MATERIALS;
PHOTOVOLTAIC EFFECTS;
SEMICONDUCTING SILICON;
SEMICONDUCTOR DEVICE MANUFACTURE;
SINGLE CRYSTALS;
SOLIDIFICATION;
MULTICRYSTALLINE SILICON INGOTS;
SINGLE CRYSTAL GROWTH PROCESS;
METALLURGICAL FURNACES;
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EID: 0030385358
PISSN: 01608371
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (9)
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