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Volumn 13, Issue 3, 1996, Pages 159-163
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Three-dimensional patterning technology for the fabrication of complex micro-components
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NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
DIELECTRIC MATERIALS;
FABRICATION;
INFRARED DETECTORS;
MICROMACHINING;
OPTICS;
PHOTOLITHOGRAPHY;
PHOTORESISTS;
THREE DIMENSIONAL;
ULTRAVIOLET RADIATION;
IMMERSION LENSES;
IMPLANT DEPTH;
ION MILLING;
METALLIZATION THICKNESS;
MICRO COMPONENTS;
MICRO ENGINEERING;
MICROLENSES;
PATTERNING;
RADIATION BEAM;
UNIFORM ETCH DEPTH;
MICROELECTRONICS;
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EID: 0030384538
PISSN: 02649187
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (3)
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References (8)
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