Planar capacitive micro positioning sensor

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 1996, Pages 85-90

  Furuichi, Hiroaki ^a   Fearing, Ronald S ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CONDUCTIVE MATERIALS; MICROELECTRODES; MICROMETERS; MOBILE ROBOTS; PRINTED CIRCUIT BOARDS; SENSORS; TRACKING (POSITION);

MICROPOSITIONING SENSOR; SENSING ELECTRODES; SENSOR ARRAY;

MICROELECTROMECHANICAL DEVICES;

EID: 0030384454     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)