Enhancement of Electron Emission Efficiency and Stability of Molybdenum Field Emitter Array by Diamond-Like Carbon Coating

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 1996, Pages 293-296

  Jung, J H ^a   Ju, B K ^a   Lee, Y H ^a   Oh, M H ^a   Jang, J ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; COATINGS; FIELD EMISSION; FIELD EMISSION CATHODES; IRON COMPOUNDS; MOLYBDENUM; MOLYBDENUM COMPOUNDS; PLASMA CVD; ARRAYS; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELECTRIC CURRENTS; PLASMA APPLICATIONS;

ANODE CURRENTS; DIAMOND LIKE CARBON COATINGS; ELECTRON EMISSION EFFICIENCY; EMISSION CURRENT; EMISSION STABILITY; EMITTER ARRAYS; GATE VOLTAGES; LAYER-BY-LAYER TECHNIQUES; MAXIMUM EMISSIONS; MOLYBDENUM FIELD EMITTER ARRAYS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; ELECTRON EMISSION;

DIAMOND LIKE CARBON COATING; EMISSION CURRENT; MOLYBDENUM FIELD EMITTER ARRAYS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 0030384443     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.1996.553587     Document Type: Conference Paper

References (8)

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