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Volumn 104, Issue 12, 1996, Pages 1137-1142
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Adherent diamond coating on silicon nitride substrate
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Author keywords
Adherence; Cutting tool; Diamond film; Microwave plasma CVD; Silicon nitride substrate
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COATING TECHNIQUES;
DIAMOND CUTTING TOOLS;
DIAMOND FILMS;
ETCHING;
MECHANICAL TESTING;
MILLING (MACHINING);
POROUS MATERIALS;
SERVICE LIFE;
SILICON NITRIDE;
SUBSTRATES;
ULTRASONIC CUTTING;
ADHERENT DIAMOND COATING;
DIAMOND MICROFLAWING;
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION;
ABRASIVE COATINGS;
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EID: 0030384106
PISSN: 09145400
EISSN: None
Source Type: Journal
DOI: 10.2109/jcersj.104.1137 Document Type: Article |
Times cited : (8)
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References (8)
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