Modeling electrostatic scanning force microscopy of semiconductors

Materials Science and Engineering B

Volumn 42, Issue 1-3, 1996, Pages 99-104

  Donolato, C ^a  

^a CNR   (Italy)

Author keywords

Electrostatic interaction; Scanning force microscopy; Semiconductors

Indexed keywords

CAPACITANCE; ELECTRIC SPACE CHARGE; ELECTROSTATICS; PERMITTIVITY; SCANNING; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR MATERIALS;

ELECTROSTATIC INTERACTION; SCANNING FORCE MICROSCOPY (SFM);

SEMICONDUCTOR DEVICE MODELS;

EID: 0030383830     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01689-3     Document Type: Article

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