Characterization of titanium thin films prepared by bias assisted magnetron sputtering

Metallurgical and Materials Transactions B: Process Metallurgy and Materials Processing Science

Volumn 27, Issue 6, 1996, Pages 1057-1060

  Vijaya, H S ^a   Muralidhar, G K ^b   Subbanna, G N ^a   Mohan Rao, G ^a   Mohan, S ^b  

^a INDIAN INSTITUTE OF SCIENCE   (India)

^b RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

FILM PREPARATION; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; METALLIZING; METALLOGRAPHIC MICROSTRUCTURE; PHASE TRANSITIONS; PRESSURE EFFECTS; SPUTTER DEPOSITION; STRESS ANALYSIS; THIN FILMS; TITANIUM;

BODY CENTERED CUBIC (BCC) TITANIUM PHASE; EVAPORATED FILMS; SHEET RESISTANCE;

METALLIC FILMS;

EID: 0030383822     PISSN: 10735615     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11663-996-0020-0     Document Type: Article

References (16)

1. J. Kong, H. Shen, B. Chen, Z. Li, W. Shi, W. Yao, and Zh. Qi: Thin Solid Films, 1992, vol. 207, pp. 51-53.
2. H. Ljungcrantz, L. Hultman, and J.E. Sundgren: J. Vac. Sci. Technol. A, 1993, vol. 11, pp. 543-53.
3. F.A. Smidt: Int. Mater. Rev., 1990, vol. 35, pp. 61-128.
4. B.D. Cullity: Elements of X-Ray Diffraction, Addison-Wesley Publishing Company, London, 1967, pp. 444-53.
5. W.D. Westwood: Progr. Surface Sci., 1976, vol. 7, pp. 71-111.
6. P.R. Stuart: Vacuum, 1969, vol. 19, pp. 507-11.
7. J.A. Thomton: J. Vac. Sci. Techol, 1974, vol. 11, pp. 666-69.
8. D. Hoffmann and J. Thomton: Thin Solid Films, 1977, vol. 40, pp. 355-63.
9. V. Valvoda, A.J. Perry, L. Hultman, J. Mucil, and S. Kadlec: Surf. Coat. Technol, 1991, vol. 49, pp. 181-85.
10. D.W. Hoffman and J.A. Thomton: J. Vac. Sci. Technol., 1982, vol. 20, pp. 355-58.
11. M. Ohring: The Materials Science of Thin Films, Academic Press, New York, NY, 1992, pp. 427-29.
12. D.M. Mattox: J. Vac. Sci. Technol. A, 1989, vol. 7, pp. 1105-14.
13. J.A. Thomton and D.W. Hoffman: J. Vac. Sci. Technol, 1977, vol. 14, pp. 164-68.
14. J.A. Thomton: Ann. Rev. Mater. Sci., 1977, vol. 7, pp. 239-60.
15. A.F. Jankowski and Mark A. Wall: J. Mater. Res., 1994, vol. 9, pp. 31-38.
16. Satish Vitta, A.L. Greer, and R.E. Somekh: Mater. Sci. Eng., 1988, vol. 98, pp. 105-09.