Kinetics of GaAs Dissolution in H2O2-NH4OH-H2O Solutions

Industrial and Engineering Chemistry Research

Volumn 35, Issue 12, 1996, Pages 4464-4470

  Bryce, Christine ^a   Berk, Dimitrios ^a  

^a MCGILL UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMMONIUM COMPOUNDS; CHEMICAL REACTORS; COMPOSITION EFFECTS; DISSOLUTION; ETCHING; HYDROGEN PEROXIDE; OXIDATION; REACTION KINETICS; SOLUBILITY; WATER; X RAY SPECTROSCOPY;

BATCH STIRRED TANK REACTORS; WET ETCHING; X RAY PHOTON SPECTROSCOPY;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0030383387     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie960278t     Document Type: Article

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