SCOPUS 정보 검색 플랫폼

Volumn 103, Issue 4, 1996, Pages 459-463

Thermal regrowth of Si( 100) damaged by Ne, Ar, and Xe ion bombardment

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ARGON; CRYSTAL GROWTH; ION BOMBARDMENT; IONS; NEON; PHOTOEMISSION; SPUTTERING; SURFACE CLEANING; XENON;

ANGLE RESOLVED PHOTOEMISSION; ION SPUTTERING; THERMAL INDUCED REGROWTH;

SILICON;

EID: 0030382872 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00451-5 Document Type: Article

Times cited : (2)

References (16)

1
- 0005464288
- L.S.O. Johansson, R.I.G. Uhrberg and G.V. Hansson, Surf. Sci. 189/190 (1987) 479.
- (1987) Surf. Sci. , vol.189-190 , pp. 479
- Johansson, L.S.O.¹ Uhrberg, R.I.G.² Hansson, G.V.³

2
- 0018523360
- F.J. Himpsel and D.E. Eastman, J. Vac. Sci. Technol. 16 (1979) 1297.
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 1297
- Himpsel, F.J.¹ Eastman, D.E.²

3
- 3643097216
- I. Yamada, D. Marton and F.W. Saris, Appl. Phys. Lett. 37 (1980) 563.
- (1980) Appl. Phys. Lett. , vol.37 , pp. 563
- Yamada, I.¹ Marton, D.² Saris, F.W.³

4
- 0019570827
- G. Petõ and J. Kanski, Solid State Commun. 38 (1981) 377.
- (1981) Solid State Commun. , vol.38 , pp. 377
- Petõ, G.¹ Kanski, J.²

5
- 0029531262
- G. Petõ and J. Kanski, Solid State Commun. 96 (1995) 919.
- (1995) Solid State Commun. , vol.96 , pp. 919
- Petõ, G.¹ Kanski, J.²

6
- 0001334260
- S. Roorda, J.S. Custer, W. Sinke, J.M. Poate, D.C. Jakobson, A. Polman and F. Spaepen, Nucl. Instr. Meth. B 59/60 (1991) 344.
- (1991) Nucl. Instr. Meth. B , vol.59-60 , pp. 344
- Roorda, S.¹ Custer, J.S.² Sinke, W.³ Poate, J.M.⁴ Jakobson, D.C.⁵ Polman, A.⁶ Spaepen, F.⁷

7
- 0000610804
- J.M. Poate, S. Coffa, D.C. Jakobson, A. Polman, J.A. Roth, G.L. Olson, S. Roorda, W. Sinke, J.S. Custer, M.O. Thompson, F. Spaepen and E. Donovan, Nucl. Instr. Meth. 55 (1991) 533.
- (1991) Nucl. Instr. Meth. , vol.55 , pp. 533
- Poate, J.M.¹ Coffa, S.² Jakobson, D.C.³ Polman, A.⁴ Roth, J.A.⁵ Olson, G.L.⁶ Roorda, S.⁷ Sinke, W.⁸ Custer, J.S.⁹ Thompson, M.O.¹⁰ Spaepen, F.¹¹ Donovan, E.¹²

8
- 3643078126
- S. Coffa, F. Priolo and A. Battaglia, Phys. Rev. Lett. 70 (1993) 3756.
- (1993) Phys. Rev. Lett. , vol.70 , pp. 3756
- Coffa, S.¹ Priolo, F.² Battaglia, A.³

9
- 0008658076
- L.P. Avakyants and E.D. Obrasztsova, J. Mol. Struct. 219 (1990) 141.
- (1990) J. Mol. Struct. , vol.219 , pp. 141
- Avakyants, L.P.¹ Obrasztsova, E.D.²

10
- 0008621009
- G. Petõ, J. Kanski and U, Södervall, Phys. Lett. 124 (1987) 510.
- (1987) Phys. Lett. , vol.124 , pp. 510
- Petõ, G.¹ Kanski, J.² Södervall, U.³

11
- 0019602455
- G. Petõ, T. Lohner, J. Kanski and J. Gyulai, Nucl. Instr. Meth. 199 (1982) 445.
- (1982) Nucl. Instr. Meth. , vol.199 , pp. 445
- Petõ, G.¹ Lohner, T.² Kanski, J.³ Gyulai, J.⁴

12
- 4243897447
- B. von Roedern, L. Ley and M. Cardona, Phys. Rev. Lett. 39 (1977) 1576.
- (1977) Phys. Rev. Lett. , vol.39 , pp. 1576
- Von Roedern, B.¹ Ley, L.² Cardona, M.³

13
- 0008745689
- J.A.R. Samson, J.L. Gardner and A.F. Starace, Phys. Rev. A 12 (1975) 1459.
- (1975) Phys. Rev. A , vol.12 , pp. 1459
- Samson, J.A.R.¹ Gardner, J.L.² Starace, A.F.³

14
- 0017916807
- U. Tseng, J. Gyulai, T. Koji, S.S. Lau, J. Roth and J.W. Mayer, Nucl. Instr. Meth. 149 (1978) 615.
- (1978) Nucl. Instr. Meth. , vol.149 , pp. 615
- Tseng, U.¹ Gyulai, J.² Koji, T.³ Lau, S.S.⁴ Roth, J.⁵ Mayer, J.W.⁶

15
- 0000783774
- C.V. Thompson, J. Floro and H.I. Smith, J. Appl. Phys. 67 (1990) 4099.
- (1990) J. Appl. Phys. , vol.67 , pp. 4099
- Thompson, C.V.¹ Floro, J.² Smith, H.I.³

16
- 0028758924
- T. Yao, K. Uesugi, M. Yoshimura, T. Sato, T. Sueyoshi and M. Iwatsuki, Appl. Surf. Sci. 75 (1994) 139.
- (1994) Appl. Surf. Sci. , vol.75 , pp. 139
- Yao, T.¹ Uesugi, K.² Yoshimura, M.³ Sato, T.⁴ Sueyoshi, T.⁵ Iwatsuki, M.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.