Study of a compact three-electrode oscillator-amplifier excimer laser system

Optics Communications

Volumn 132, Issue 5-6, 1996, Pages 565-573

  Bollanti, S ^a   Di Lazzaro, P ^a   Flora, F ^a   Letardi, T ^a   Murra, D ^a,b   Petrucci, C ^a   Uteza, O ^a,c  

^a ENEA   (Italy)

^b ENEA   (Italy)

^c AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMPLIFICATION; DIFFRACTION; ELECTRODES; LASER BEAMS; OPTICAL RESONATORS; OSCILLATORS (ELECTRONIC); POWER AMPLIFIERS;

BEAM POINTING STABILITY; GAUSSIAN BEAM; IANUS LASER; OSCILLATOR OPTICAL CAVITY; RADIANCE; TIMES DIFFRACTION LIMIT;

EXCIMER LASERS;

EID: 0030382386     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/0030-4018(96)00381-1     Document Type: Article

References (25)

1. See e.g. G. Klauminzer, Lasers and Applications (Sept. 1986) pp. 75-78.
2. R.G. Caro, M.C. Gower and C.E. Webb, J. Phys. D 15 (1982) 767; T.J. McKee, Optics Lett. 15 (1990) 795.
3. R.G. Caro, M.C. Gower and C.E. Webb, J. Phys. D 15 (1982) 767; T.J. McKee, Optics Lett. 15 (1990) 795.
4. V. Nassisi and M.R. Perrone, Appl. Phys. B 51 (1990) 254.
5. T.J. McKee, S.D. Hastie and R.W. Weeks, J. Appl. Phys. 56 (1984) 2170.
6. S. Bollanti, P. Di Lazzaro, F. Flora, G. Giordano, T. Letardi, G. Schina and C.E. Zheng, Rev. Sci. Instrum. 65 (1994) 315.
7. S. Bollanti, P. Di Lazzaro, F. Flora, G. Giordano, T. Letardi, C. Petrucci, G. Schina and C.E. Zheng, Compact three electrodes excimer laser IANUS for a POPA optical system, Proc. SPIE 2206 (1994) pp. 144-153.
8. W. Long, M. Plummer and E. Stappaerts, Appl. Phys. Lett. 43 (1983) 735.
9. P. Di Lazzaro, T. Letardi and C.E. Zheng, II Nuovo Cimento D 14 (1992) 41.
10. T. Letardi, V. Boffa, S. Bollanti, P. Di Lazzaro, G. Giordano, T. Hermsen, E. Sabia and C.E. Zheng, II Nuovo Cimento D 11 (1989) 1733.
11. S. Bollanti, P. Di Lazzaro, F. Flora, T. Letardi, N. Lisi and C.E. Zheng, Appl. Phys. B 55 (1992) 84.
12. R.S. Taylor, Appl. Phys. B 41 (1986) 1.
13. P. Gobbi and G. Reali, Optics Comm. 52 (1984) 195.
14. P. Di Lazzaro, T. Hermsen, T. Letardi and C.E. Zheng, Optics Comm. 61 (1987) 393.
15. V. Boffa, P. Di Lazzaro, G. Gallerano, G. Giordano, T. Hermsen, T. Letardi and C.E. Zheng, IEEE J. Quantum Electron. QE-23 (1987) 1241.
16. J. Chen, V. Nassisi and M. Perrone, Opt. Quantum Electron. 23 (1991) 35.
17. P. Di Lazzaro, T. Hermsen and C.E. Zheng, IEEE J. Quantum Electron. QE-24 (1988) 1543.
18. P. Di Lazzaro, V. Nassisi and M. Perrone, IEEE J. Quantum Electron. QE-24 (1988) 2284.
19. T.J. Mc Kee, Appl. Optics 30 (1991) 635.
20. S. Bollanti, P. Di Lazzaro and D. Murra, How many times is a laser beam diffraction limited?, ENEA Internal Report RT/INN/95/23.
21. A.E. Siegman, New developments in laser resonators, Proc. SPIE 1224 (1990) pp. 2-4.
22. P. Di Lazzaro, Current Topics Quantum Electronics 1 (1994) 53.
23. M. Kushner, IEEE Trans. Plasma Sciences 19 (1991) 387.
24. T.J. Mc Kee and S. Fendryowski, Appl. Optics 32 (1993) 275.
25. F. Bijkerk and A.P. Shevelko, Soft x-ray radiation from excimer-driven laser-plasma sources: application to submicron lithography, in: Excimer lasers, ed. L. Laude, NATO ASI Series E 265 (Kluwer, 1994) pp. 339-353.