Silicon-micromachined poppet valve with an octagonal diaphragm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2879, Issue , 1996, Pages 216-224

  Siekkinen, James W ^a   Haltiner, K J ^a   Chilcott, Dan W ^a   Huang, L X ^a   Staller, Steve E ^a  

^a DELPHI CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OCTAGONAL DIAPHRAGMS; POPPET VALVES;

ALIGNMENT; BONDING; DIAPHRAGMS; MICROELECTRONICS; SEMICONDUCTING SILICON; SPRINGS (COMPONENTS); VALVES (MECHANICAL);

MICROMACHINING;

EID: 0030381416     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)