Characteristics of a reactively sputtered indium tin oxide thin film strain gage for use at elevated temperatures

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 597-602

  Gregory, Otto J ^a   Dyer, Stephen E ^a   Amons, Paul S ^a   Slot, Arnout Bruins ^a  

^a UNIVERSITY OF RHODE ISLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC PROPERTIES; HYSTERESIS; INDIUM COMPOUNDS; OHMIC CONTACTS; OXIDES; PLATINUM; SPUTTERING; STRAIN MEASUREMENT; TEMPERATURE; THIN FILMS;

DYNAMIC STRAIN; INDIUM TIN OXIDE; PIEZORESISTIVE PROPERTIES; REACTIVE SPUTTERING; STATIC STRAIN;

STRAIN GAGES;

EID: 0030381287     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)