Origin of in-plane texturing in sputtered Mo films

Materials Research Society Symposium - Proceedings

Volumn 403, Issue , 1996, Pages 33-38

  Malhotra, A K ^a   Yalisove, S M ^a   Bilello, J C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; FILM GROWTH; GRAIN GROWTH; MAGNETRON SPUTTERING; MOLYBDENUM; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TEXTURES; X RAY ANALYSIS;

IN PLANE TEXTURE; IN PLANE TEXTURING; MOLYBDENUM FILMS; OUT OF PLANE TEXTURE;

METALLIC FILMS;

EID: 0030381276     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)