Multilevel 3D patterning of stacked PMMA sheets for x-ray microlithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 231-235

  Calderon, Gina ^a   Morris, Kevin J ^a   Vladimirsky, Olga ^a   Vladimirsky, Yuli ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; PHOTORESISTS; POLYMETHYL METHACRYLATES;

3D PATTERNING; LATENT IMAGES;

X RAY LITHOGRAPHY;

EID: 0030381038     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250955     Document Type: Conference Paper

References (11)