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Volumn 86-87, Issue PART 1, 1996, Pages 338-344

Modelling of concentration distributions of active species during plasma nitriding

Author keywords

Active species; Excitation mechanisms; Nitriding

Indexed keywords

COMPUTER SIMULATION; ELECTRONIC DENSITY OF STATES; ENERGY TRANSFER; MATHEMATICAL MODELS; MOLECULAR VIBRATIONS; NITROGEN; PLASMA APPLICATIONS;

EID: 0030380508     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03037-X     Document Type: Article
Times cited : (2)

References (16)
  • 1
    • 0348084078 scopus 로고
    • Ph.D. Thesis, INPL France
    • J.L. Marchand, Ph.D. Thesis, INPL France, 1988.
    • (1988)
    • Marchand, J.L.1
  • 10
    • 0348084074 scopus 로고
    • PhD. Thesis, Paris France
    • J.P. Boeuf, PhD. Thesis, Paris France, 1985.
    • (1985)
    • Boeuf, J.P.1
  • 11
    • 0346823280 scopus 로고
    • Internal Report, ITESM-CEM
    • L. Layeillon, Internal Report, ITESM-CEM, 1993.
    • (1993)
    • Layeillon, L.1
  • 12
    • 0346192712 scopus 로고
    • M.Sc. Thesis, ITESM-CEM
    • V.M. Romero, M.Sc. Thesis, ITESM-CEM, 1992.
    • (1992)
    • Romero, V.M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.