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Volumn 86-87, Issue PART 1, 1996, Pages 338-344
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Modelling of concentration distributions of active species during plasma nitriding
a a a |
Author keywords
Active species; Excitation mechanisms; Nitriding
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Indexed keywords
COMPUTER SIMULATION;
ELECTRONIC DENSITY OF STATES;
ENERGY TRANSFER;
MATHEMATICAL MODELS;
MOLECULAR VIBRATIONS;
NITROGEN;
PLASMA APPLICATIONS;
ACTIVE SPECIES;
EXCITATION MECHANISM;
PLASMA NITRIDING;
VIBRATIONAL ENERGY;
NITRIDING;
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EID: 0030380508
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(96)03037-X Document Type: Article |
Times cited : (2)
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References (16)
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