The future of microelectronics: Evolution or revolution?

Microelectronic Engineering

Volumn 34, Issue 1, 1996, Pages 125-134

  Van Rossum, M ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL RESEARCH; INTEGRATED CIRCUITS; LITHOGRAPHY; MICROELECTRONIC PROCESSING; MOSFET DEVICES; NANOTECHNOLOGY; PROCESS ENGINEERING; SEMICONDUCTING SILICON;

SEMICONDUCTOR INDUSTRY; SILICON MICROELECTRONICS;

MICROELECTRONICS;

EID: 0030379859     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00016-0     Document Type: Article

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