SOI technologies, materials and devices

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 1996, Pages 3-12

  Cristoloveanu, Sorin ^a   Balestra, Francis ^a  

^a Grenoble INP Phelma   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; FABRICATION; GATES (TRANSISTOR); HOT CARRIERS; MOSFET DEVICES; SEMICONDUCTOR JUNCTIONS; SILICON WAFERS; ULSI CIRCUITS;

ACTIVE DEVICE OVERLAY; BULK SILICON; DIELECTRIC ISOLATION; DUAL GATE CONTROL; ELECTRON TRANSPORT; HOT CARRIER INJECTION; PARASITIC CAPACITANCE; SHORT CHANNEL EFFECTS; VERTICAL JUNCTIONS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0030379377     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (29)