Growth and properties of very large crystals of semi-insulating gallium arsenide

Technical Digest - GaAs IC Symposium (Gallium Arsenide Integrated Circuit)

Volumn , Issue , 1996, Pages 54-57

  Ware, R M ^a   Higgins, W ^a   O'Hearn, K ^a   Tiernan, M ^a  

^a M/A COM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; ELECTRIC PROPERTIES; INGOTS; INTERFACES (MATERIALS); PROCESS CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SINGLE CRYSTALS; SUBSTRATES;

LIQUID ENCAPSULATED CZOCHRALSKI PROCESS; SINGLE HEATER SYSTEM; THERMAL GEOMETRY;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0030379324     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)