Nuclear magnetic resonance studies of hydrogen in amorphous silicon

Materials Research Society Symposium - Proceedings

Volumn 420, Issue , 1996, Pages 475-483

  Norberg, R E ^a   Fedders, P A ^a   Leopold, D J ^a  

^a WASHINGTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHEMICAL VAPOR DEPOSITION; HYDROGENATION; NUCLEAR MAGNETIC RESONANCE;

DEUTERON MAGNETIC RESONANCE; HYDROGENATED AMORPHOUS SILICON; MOLECULAR HYDROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

AMORPHOUS SILICON;

EID: 0030379244     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-420-475     Document Type: Conference Paper

References (6)