Analysis of fixed-fixed beam test structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2880, Issue , 1996, Pages 46-55

  Marshall, Janet C ^a   Read, David T ^a   Gaitan, Michael ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIBILITY; DESIGN; MICROMACHINING; STRAIN; TESTING;

COMPRESSIVE STRAIN; FIXED-FIXED BEAM TEST STRUCTURES; MICROELECTROMECHANICAL SYSTEMS;

ELECTROMECHANICAL DEVICES;

EID: 0030378932     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.250961     Document Type: Conference Paper

References (12)