Surface micromachined deformable mirrors

IEEE Symposium on Emerging Technologies & Factory Automation, ETFA

Volumn 2, Issue , 1996, Pages 393-399

  Bifano, Thomas G ^a   Krishnamoorthy, Raji ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ADAPTIVE OPTICS; COMPUTER SIMULATION; CORRELATION METHODS; FREQUENCY RESPONSE; MICROMACHINING; MIRRORS;

DEFORMABLE MIRRORS; ELECTROSTATICALLY CONTROLLED MICROACTUATORS; SHOOTING METHOD; TWENTY CHANNEL PARALLEL CONTROL SCHEME;

MICROELECTROMECHANICAL DEVICES;

EID: 0030378789     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)